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Foamex Asia WCC Introduces ScrubWRIGHT


Vista, CA - February 6, 2007 – The WCC Division of Foamex Asia (FWCC) introduces ScrubWRIGHT™ to its market-leading line of vacuum maintenance products that provide chipmakers, flat panel display fabs and disk drive companies innovative cleaning tools to improve the cleanliness and uptime of process chambers. ScrubWRIGHT™ is a unique tool specially designed to be used with a Diamond UltraSOLV® ScrubBELT™ of varying grits to remove process deposition and polish critical surfaces in the latest generation vacuum chambers. ScrubWRIGHT™ is spring adjustable for easy mounting and rotation of the ScrubBELT™.

ScrubWRIGHT™ with ScrubBELT™ makes it possible for maintenance staff to safely and efficiently clean critical surfaces including ESC’s, o-ring grooves, susceptors, shower heads and vacuum sealing surfaces. The ScrubWRIGHT™ can also be used to access hard to reach areas such as beam-defining apertures, slit valves, view ports and more. As our customers strive to meet tighter DOW (Defect on Wafer) specs and COO targets in newer generation fabs they need specialized cleaning tools that allow higher MTBWC and shorter Green-to-Green times. According to Roger Lachenbruch, Manager, Virtual Factory Engineering, Pentagon Technologies, products that improve wet strip procedures and maximize ROI are becoming more critical.

ScrubWRIGHT™ and ScrubBELT™ are available immediately and are already being used in advanced 200 and 300 mm fabs to maintain such tools as AMAT TXZ, Quantum Implant, Endura, LAM 2300 etch systems, Hitachi etch systems, AMAT and Novellus HDP CVD systems as well as Varian and Axcelis Implant tools.

About The WCC Division of Foamex Asia: The WCC Division of Foamex Asia is the leading provider of cleaning tools used to maintain process equipment in the Semiconductor, LCD and Disk Drive industries. The company’s line of UltraSOLV® Chamber Cleaning products are used by the leading Wafer Fabrication LCD and Disk Drive companies worldwide to reduce cost of ownership and system downtime.



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