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AIXTRON provides MOCVD system to Nagoya University

Leading Japanese research institution works on pushing out the limits of GaN-based DUV devices with proven AIXTRON technology

Herzogenrath/Germany – WEBWIRE

AIXTRON SE (FSE: AIXA), a worldwide leading provider of deposition equipment to the semiconductor industry, has delivered a Close Coupled Showerhead® (CCS) system to Nagoya University (Japan). AIXTRONs 3x2-inch Flip Top CCS MOCVD platform is intended for research in the field of gallium nitride (GaN)-based deep ultra-violet (DUV) optoelectronic devices and has been installed at the University’s Institute of Materials and Systems for Sustainability (IMaSS).

Nagoya University is one of the leading Japanese research institutions for semiconductor materials, especially in the field of GaN-based structures. By focusing on the development of DUV devices with AIXTRONs 3x2-inch Flip Top CCS MOCVD tool, IMaSS takes into account their benefit for a wide range of future-oriented applications in areas such as agriculture, health or water purification.

Specially designed for research and small series production, the proven AIXTRON system enables real scaling from R&D to large series production. The unique Close Coupled Showerhead concept inherently allows an extremely uniform and reproducible deposition of various complex, mostly single crystal materials. The high flexibility of the exceptional reactor design enables not only further developments of existing materials and their application in future devices, but also permits extensive research into completely materials, their properties and potential applications. 

“In addition to its excellent technical performance, our Closed Coupled Showerhead® Flip Top Reactor is characterized by its easy maintenance and lowest running cost. The system is one of the most successful AIXTRON products as proven by numerous orders from universities, laboratories and other research institutions worldwide. We are looking forward to closely cooperate with Nagoya University and its renowned IMaSS,” comments Dr. Bernd Schulte, President of AIXTRON SE.

Our registered trademarks: AIXACT®, AIXTRON®, Atomic Level Solutions®, Close Coupled Showerhead®, CRIUS®, EXP®, EPISON®, Gas Foil Rotation®, Optacap™, OVPD®, Planetary Reactor®, PVPD®, STExS®, Trijet®

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