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Air Products Introduces GASGUARD® Very High Flow System (VHF) for Specialty Gas Delivery


Air Products (NYSE:APD) is pleased to introduce its new GASGUARD® Very High Flow System (VHF) for bulk specialty gas delivery. The VHF is the latest offering from Air Products’ industry leading Bulk Specialty Gas Systems (BSGS). The new VHF can economically deliver 1,000 standard liters per minute or more, contingent on service and application.

“As the demand for specialty gases to the semiconductor (IC), photovoltaic (PV) and TFT-LCD industries continues to grow, we have been able to deliver gases in the safest and most cost effective manner,” says Joe Stockunas, general manager, Electronics Equipment and Services. “Our new VHFS enables fab operators to lower their cost of ownership by reducing capital costs, as well as lowering square footage and exhaust flow requirements. The VHF is specifically designed to address the needs of IC, PV, and thin-film transistor liquid crystal display manufacturers.”

For device manufacturers who are using high volumes of specialty gases, the VHF offers improved flow, improved cost of ownership (CoO), and product dependability. Air Products has leveraged its experience as the leader in providing BSGS technology to customers around the world with more bulk gas systems installed than all competitors combined.


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