Nikon introduces the next generation of Video Measuring Systems: “NEXIV VMF-K” Series

Nikon Corporation (Nikon) is pleased to announce the release of the Video Measuring System “NEXIV VMF-K” series. This system can automatically measure the dimensions of electronic components, including semiconductor devices.

The “NEXIV VMF-K” series features a confocal optical system that can measure not only the two-dimensional but also the height of an object. The improved speed in measuring the height, results in a throughput that is approximately 1.5 times faster* than the previous model “NEXIV VMZ-K” series.

1. *Based on measurement conditions specified by Nikon.

Product Name                Video Measuring System “NEXIV VMF-K3040”, “NEXIV VMF-K6555”

Order start date              December 2024

As semiconductors become smaller and more integrated, inspection processes are increasingly crucial for quality maintenance. The NEXIV VMF-K Series addresses this challenge by providing stable measurements of micron-level dimensions while significantly improving throughput. Thereby supporting stringent quality control in semiconductor device manufacturing.

The VMF-K Series achieves 1.5 times higher measurement throughput compared to the previous models by revising the mechanical design of the optical system for faster height measurement. This significantly reduces measurement time and contributes to the efficient quality control processes in the production of semiconductors and electronic devices.

In addition to the conventional 30x magnification, we have added a higher magnification model of 45x to our lineup. This supports the demands to measure line widths of 2 µm or less in advanced semiconductor packaging.

• Longer-lasting LED confocal light source
• Compliant with SEMI S2/S8 safety standards for semiconductor manufacturing equipment
• Display now shows remaining measurement time
• New black and silver exterior based on factory design

Model number                                                  VMF-K3040                                         VMF-K6555
 
Stroke
(X x Y x Z)                                                        300x400x150 mm                          650x550x150 mm
 
Accuracy guaranteed
loading capacity                                             20 kg                                                          30 kg
 
Maximum permissible error
(L: length in mm)                                             EUX, MPE EUY, MPE ±(1.2 + 4L/1000) µm
                                                                         EUXY, MPE ±(2.0 + 4L/1000) µm
                                                                         EUZ, MPE ±(1 + L/1000) µm
 
Optical Magnification                               1.5x/3.0x/7.5x/15x/30x/45x
 
Field of view
(confocal optics)                                            1.5x: 7.80x5.82 mm
                                                                          3.0x: 3.90x2.91 mm
                                                                          7.5x: 1.56x1.17 mm
                                                                          15x: 0.78x0.58 mm
                                                                          30x: 0.39x0.29 mm
                                                                          45x: 0.26x0.19 mm
Field of view^*1
(bright field optics)                                      1.5x: 7.80x5.85~0.52x0.39 mm
                                                                          3.0x: 3.90x2.92~0.26x0.19 mm
                                                                          7.5x: 1.56x1.17~0.10x0.078 mm
                                                                          15x: 1.26x0.95~0.099x0.074 mm
                                                                          30x: 0.63x0.47~0.052x0.039 mm
                                                                          45x: 0.63x0.47~0.052x0.039 mm
Autofocus
(bright field optics)                                      TTL laser AF/Image AF
 
Illumination
(bright field optics)                                      1.5x/3.0x/7.5x/15x: Diascopic,
                                                                          coaxial episcopic and ring
                                                                          30x/45x: Diascopic and coaxial episcopic
 
Power source and power
consumption                                                     AC 100V-240V ±10%, 50/60Hz / 13A-10A
 
Main body dimensions (
W x D x H) and weight                                1146x1247x1973 mm / approx. 800 kg           1198x1640x1973 mm / approx. 800 kg
 
Controller dimensions
(W x D x H) and weight                              190x450x440 mm / approx. 14 kg
 
Recommended installation
dimensions (W x D) ^*2                                 3150x3000 mm                                3200x3300 mm
 
Minimum installation
dimensions (W x D)                                      2500x1600 mm                                2500x1900 mm

1. *1Motorized 5-step zoom.
2. *2Includes our recommended maintenance space.

The information contained in this press release is current as of the date of announcement.