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ASM International N.V. and University of Helsinki Renew Research Agreement on Atomic Layer Deposition


HELSINKI, Finland and ALMERE, the Netherlands - ASM International N.V. (NASDAQ: ASMI and Euronext Amsterdam: ASM) and the University of Helsinki announced today that they have renewed their long-term research agreement in the field of Atomic Layer Deposition for another 5-years.

Atomic Layer Deposition (ALD) is an advanced technology for depositing thin film materials one atom at a time, for use in integrated circuits and other applications. ASM and the University of Helsinki have been pioneers in ALD technology for two decades.

ASM Chief Technology Officer, Ivo Raaijmakers, commented: “The cooperation of University basic ALD research and ASM equipment development has proved very successful in bringing ALD process technology to the semiconductor industry since this project began in 2004. It has also strengthened our portfolio of intellectual property rights in this process technology platform. Recently, the accord has generated some key innovations in such areas as noble metals and phase change materials deposition, previously thought impossible with ALD, which are currently under study for high volume manufacturing”.

“In the current global situation of fragmented research funding, this agreement is exceptional both in terms of length and volume”, commented Professors Markku Leskelä and Mikko Ritala, the heads of the ALD research group at the Laboratory of Inorganic Chemistry at the University. “We and our students also greatly appreciate the kind of collaboration with industry that takes us to the area where basic and applied research becomes mixed. The questions we deal with in our research are fundamental by their nature, yet their solutions may find rapid use in future semiconductor devices.”

About the University of Helsinki
One of the oldest universities in Europe, the University of Helsinki, founded in 1640, concentrates on high-level scientific research and researcher education. Through its 60 graduate schools, the University focuses on post-graduate education. It is one of the world’s leading academic research institutes in the field of Atomic Layer Deposition.

ASM International
ASM International N.V. and its subsidiaries design and manufacture equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing (Front-end segment) as well as assembly and packaging (Back-end segment) through facilities in the United States, Europe, Japan and Asia. ASM International’s common stock trades on NASDAQ (symbol ASMI) and the Euronext Amsterdam Stock Exchange (symbol ASM). For more information, visit ASMI’s web site at

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