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Agilent Technologies Introduces Highly Sensitive Imaging Mode for Complex, Calibrated Electrical and Spatial Measurements


Agilent Technologies Inc. (NYSE: A) today announced the availability of scanning microwave microscopy (SMM) mode, a unique imaging technique that combines the comprehensive electrical measurement capabilities of a performance network analyzer (PNA) with the outstanding spatial resolution of an atomic force microscope (AFM).

ďSMM Mode outperforms traditional AFM-based scanning capacitance microscopy techniques, offering far greater application versatility, the ability to acquire quantitative results, and the highest sensitivity and dynamic range in the industry,Ē said Jeff Jones, operations manager for Agilentís AFM facility in Chandler, Ariz.

The ability to provide calibrated, high-sensitivity, complex electrical and spatial measurements makes SMM Mode particularly useful for semiconductor test and characterization. The new technique works on all semiconductors, including Si, Ge, III-V and II-VI, and does not require an oxide layer. SMM Mode enables complex impedance (resistance and reactance), calibrated capacitance, calibrated dopant density, and topography measurements. Operation at multiple frequencies -- variable up to 6GHz -- is supported.

As well as working on semiconductors, glasses, polymers, ceramics and metals, SMM Mode lets researchers perform high-sensitivity investigations of ferroelectric, dielectric and PZT materials. Studies of organic films, membranes and biological samples can also benefit from SMM Mode. The technique is very useful for characterization of interfacial properties and contrast from molecular vibrational modes. Its exceptionally high sensitivity (1.2aF) is ideal for looking at ion channels.

SMM Mode is compatible with Agilent 5400 and Agilent 5600LS atomic force microscopes. The Agilent 5400 is a high-precision AFM optimized for research, whereas the Agilent 5600LS uses a fully addressable 200mm x 200mm stage for high-resolution imaging of large samples via a new, low-noise AFM design. SMM Mode uses Agilentís multipurpose, open-loop or closed-loop large scanner, which is capable of scanning areas up to 90�m x 90�m. Interchangeable scanner nose cones enable AFM users to switch imaging modes quickly and conveniently. A variety of robust, easy-to-use sample plates are offered to facilitate SMM Mode and non-SMM Mode experiments. Agilentís industry-leading temperature control options are also available.

Join Agilent for an e-Seminar íScanning Microwave Microscopy - Electromagnetic Materials Measurements at High Spatial Resolutioní on August 7 at 9 a.m. PT. To register visit
AFM Instrumentation from Agilent Technologies

Agilent Technologies offers high-precision, modular AFM solutions for research, industry, and education. Exceptional worldwide support is provided by experienced application scientists and technical service personnel. Agilentís leading-edge R&D laboratories ensure the continued, timely introduction and optimization of innovative, easy-to-use AFM technologies.


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